sensiBel’s patented optical MEMS technology is based on the optical phenomena of interference and diffraction, both of which are due to the wave character of light. In simple terms, the microphone uses a tiny energy-efficient laser in combination with a miniaturised and integrated interferometer to measure extremely accurately the motion of a silicon-based membrane. The entire optical system is in fact smaller than a cubic millimeter! This ultra-low self-noise readout principle gives the high SNR and AOP characteristic, yet in a small MEMS package with low power consumption.

Additional benefits the optical MEMS transducer system are enhanced environmental robustness e.g. against dust, and significantly reduced likelihood for stiction (the membrane stuck to the backplate).